RF Plasma Generator Market — Development of 3D Memory Devices Boosting Growth

Posted by RASHMI on April 11th, 2019

RF Plasma Generator produces radio frequency (RF) power to generate and maintain plasma in plasma chambers. The plasma created can be used manufacturing of integrated circuits, solar cells, batteries, fuel cells, flat panel displays, data storage devices, power electronics, medical devices, optical devices and thermoelectric. These RF plasma generator are also known as inductively-heated plasma generator (IPG). It provides 10.5 kW at 13.56 MHz frequency and for this setup, the necessary power is brought by an MKS Spectrum power supply. 

There are various conditions related to the RF plasma generation which makes the construction of these generators a little bit tough for the manufacturers. There are many ways used by the manufacturers to for producing plasma. Among that one of the way to generate ionized gas, or plasma is by introducing a gas space between two electrodes. 

The global RF plasma generator has been segmented on the basis of frequency and application. Based on frequency, the global RF plasma generator market has been segmented into 13.56 MHz, 2 MHz, 400 KHz and Others. 13.56 MHz is the most common RF power frequency used to produce plasma. 

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By application, the global RF plasma generator market has been segmented into semiconductor, industrial coating, thin-film, photovoltaic and others. The semiconductor segment is anticipated to grow with a fast rate in the forecast period due to high adoption of electronic devices.