Metrology measurement of thin film

Posted by ryan on August 23rd, 2019

Optical thickness can be determined by white light interference and then the pattern is translated into optical thickness through the mathematical calculations. The thin-film metrology requires the mathematical calculations to find the presence and thickness of coatings have been deposited on the material through a variety of processes.

Film thickness

The thickness of the film can be measured by using several non-contact methods like lasers, X-rays, beta, infrared or gamma, to determine the overall film thickness and also used to measure the layer thickness in multi-layer films.

They can also be used in studying the interface behavior and also the surface of a thin film. The film thickness gauge can measure the dimension of a variety of geometrical substances up to 300mm in dm. It also uses various types of mapping patterns. There will be a detector system which accelerates the film thickness measurement process.

A device used to study optical properties

Thin-film metrology is studied using a device called microspectrophotometer is used to study thin-film optical properties. Some other names are given to this device are micro-reflectometer, microphotometer, microspectrometer.

UV visible spectrophotometer is also used as it covers infrared ranges also. It is easy to operate and it has window based software also.

Magnetic devices can also be used to study the optical properties.

Physical measures of film thickness are determined from the weight change and volume change.

Thin-film testing

The film thickness is one of the important property for the coating and it is intensively related to other properties of the thin film. The thickness of the thin film is the major prior feature for film coatings. While testing makes sure that the film is firm and microparticles are used in the manufacturing of that particular material so that it should be handled carefully. While the optical coating is done on microlens the thickness of the coat must be precise. To make thin-film accurate and general methods are used such as quartz oscillator microbalance, this controls the thickness of the film and the rate. There are two types of film thickness wet film thickness and dry film thickness.

Dry film thickness involves both damaging and non-damaging techniques. Wet film thickness includes ultrasonic, comb gauge, photothermal, etc., Damaging method includes paint inspection gauge, IG-gauge, profilometer, etc., Non-damaging method includes ultrasonic, magnetic inductive, capacity, force, photothermal methods, etc.,

Using this thin film metrology technique presence and thickness of coatings can be determined.


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